The effect of bombardment with carbon ions on the nanostructure of diamond-like films

Semiconductors

Volumn 35, Issue 5, 2001, Pages 591-597

  Faizrakhmanov I A ^a   Bazarov, V V ^a   Zhikharev, V A ^a   Khaibullin I B ^a  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035343641     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1371628     Document Type: Article

References (17)

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