Intrinsic gettering of 300 mm CZ wafers

Microelectronic Engineering

Volumn 56, Issue 1-2, 2001, Pages 157-163

  Bialas, F ^a   Winkler, R ^a   Dietrich, H ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

300 mm wafers; BMD; DRAM; Internal gettering

Indexed keywords

CRYSTAL GROWTH FROM MELT; GETTERS; IMPURITIES; PRECIPITATION (CHEMICAL); SEMICONDUCTING BORON; SEMICONDUCTOR DOPING; SUBSTRATES;

INTERNAL GETTERING;

SILICON WAFERS;

EID: 0035341556     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00520-7     Document Type: Article

References (5)

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