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Volumn 48, Issue 5, 2001, Pages 935-945
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A new model of gate capacitance as a simple tool to extract MOS parameters
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Author keywords
Capacitance measurements; Dielectric films; Electric fields; Simulations
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Indexed keywords
DEGENERACY FACTOR;
DEPLETION CHARGE;
ELECTRON CHARGE;
GATE CAPACITANCE;
PLANCK'S CONSTANT;
BAND STRUCTURE;
CAPACITANCE;
CAPACITANCE MEASUREMENT;
CARRIER CONCENTRATION;
COMPUTER SIMULATION;
DIELECTRIC FILMS;
ELECTRONIC DENSITY OF STATES;
FERMI LEVEL;
ITERATIVE METHODS;
POLYSILICON;
SEMICONDUCTOR DEVICE MODELS;
THERMAL EFFECTS;
MOSFET DEVICES;
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EID: 0035340351
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.918242 Document Type: Article |
Times cited : (32)
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References (28)
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