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Volumn 225, Issue 2-4, 2001, Pages 330-334

Enhanced bulk polysilicon production using silicon tubes

Author keywords

A3. Chemical vapor deposition processes; A3. polycrystalline deposition; B1. Elemental solids; B3. Solar cells

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; MATHEMATICAL MODELS; POLYSILICON; SOLAR CELLS; TEMPERATURE DISTRIBUTION;

EID: 0035335762     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00905-8     Document Type: Conference Paper
Times cited : (2)

References (6)
  • 2
    • 0004899233 scopus 로고    scopus 로고
    • US Patent # 3,146,123 and US Patent # 3,200,009


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.