Optical properties of oxygen-ion-implanted benzocyclobutene films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 883-886

  Mada, Y ^a   Sugitani, S ^a   Arai, K ^a   Yamasaki, K ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; ION IMPLANTATION; OPTICAL WAVEGUIDES; OXIDATION; REFRACTIVE INDEX; THERMODYNAMIC STABILITY;

BENZOCYCLOBUTENE (BCB); OPTICAL LOSSES; OXYGEN-ION IMPLANTATION;

PLASTIC FILMS;

EID: 0035334541     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1362677     Document Type: Article

References (12)