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Volumn 13, Issue 5, 2001, Pages 406-408
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Semiconductor lasers with 2-D-photonic crystal mirrors based on a wet-oxidized Al2O3-mask
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Author keywords
Aluminum compounds; Indium compounds; Photonic bandgap; Ridge waveguide lasers; Semiconductor lasers
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Indexed keywords
ALUMINA;
CRYSTALS;
DRY ETCHING;
ELECTRON BEAM LITHOGRAPHY;
MASKS;
MIRRORS;
OPTICAL WAVEGUIDES;
OXIDATION;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE STRUCTURES;
PHOTONIC BANDGAP;
PHOTONIC CRYSTALS;
RIDGE WAVEGUIDE LASERS;
WET OXIDIZATION;
SEMICONDUCTOR LASERS;
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EID: 0035334507
PISSN: 10411135
EISSN: None
Source Type: Journal
DOI: 10.1109/68.920732 Document Type: Article |
Times cited : (8)
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References (14)
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