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Volumn 13, Issue 5, 2001, Pages 406-408

Semiconductor lasers with 2-D-photonic crystal mirrors based on a wet-oxidized Al2O3-mask

Author keywords

Aluminum compounds; Indium compounds; Photonic bandgap; Ridge waveguide lasers; Semiconductor lasers

Indexed keywords

ALUMINA; CRYSTALS; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; MASKS; MIRRORS; OPTICAL WAVEGUIDES; OXIDATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0035334507     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.920732     Document Type: Article
Times cited : (8)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.