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Volumn 178, Issue 1-4, 2001, Pages 327-330
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Ion beam synthesis of CoSi2: Influence of surface kinetics on nucleation
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Author keywords
Cobalt disilicide; Implantation; Nanocluster; Nucleation; Transmission electron microscopy
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Indexed keywords
ABSORPTION;
COBALT COMPOUNDS;
DESORPTION;
DIFFUSION IN SOLIDS;
MATHEMATICAL MODELS;
NUCLEATION;
PRECIPITATION (CHEMICAL);
SYNTHESIS (CHEMICAL);
TRANSMISSION ELECTRON MICROSCOPY;
ION BEAM SYNTHESIS;
NANOCLUSTERS;
SURFACE KINETICS;
ION IMPLANTATION;
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EID: 0035334253
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(01)00514-6 Document Type: Conference Paper |
Times cited : (7)
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References (11)
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