Substrate preparations in epitaxial ZnO film growth

Journal of Crystal Growth

Volumn 225, Issue 2-4, 2001, Pages 190-196

  Zhu, Shen ^b   Su, C H ^a,b   Lehoczky, S L ^a,b   Harris, M T ^a,b   Callahan, M J ^a,b   McCarty, P ^a,b   George, M A ^a,b  

^a NASA MARSHALL SPACE FLIGHT CENTER   (United States)

^b NONE

Author keywords

A1. Surface structure; A3. Vapor phase epitaxy; B1. Oxides; B2. Semiconducting II VI materials

Indexed keywords

ANNEALING; FILM GROWTH; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SPUTTER DEPOSITION; SUBSTRATES; SURFACE TREATMENT; VAPOR PHASE EPITAXY; X RAY CRYSTALLOGRAPHY;

MAGNETRON SPUTTERING DEPOSITION;

ZINC OXIDE;

EID: 0035334165     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00873-9     Document Type: Conference Paper

References (16)

1. MRS internet