Effects of design and operating variables on process characteristics in a methane discharge: A numerical study

Plasma Sources Science and Technology

Volumn 10, Issue 2, 2001, Pages 211-225

  Bera, K ^a   Farouk, B ^a   Lee, Y H ^a  

^a Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; GLOW DISCHARGES; MATHEMATICAL MODELS; PLASMAS; SURFACE CHEMISTRY;

METHANE DISCHARGE; PLASMA DYNAMICS;

METHANE;

EID: 0035330793     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/10/2/311     Document Type: Article

References (27)