Optical profilometer based on the principle of differential interference

Optical Engineering

Volumn 40, Issue 5, 2001, Pages 833-836

  Li, Q ^a   Gao, H ^a   Xue, S ^a   Li, Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Differential interference; Profilometer; Surface topography

Indexed keywords

IMAGE PROCESSING; MICROSCOPES; OPTICAL RESOLVING POWER; PHASE SHIFT; PROFILOMETRY; SURFACE ROUGHNESS;

OPTICAL PROFILOMETERS;

OPTICAL INSTRUMENTS;

EID: 0035329371     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1359794     Document Type: Article

References (9)

1. Surface profile measurement with a scanning differential ac interferometer
2. Digital wavefront measuring interferometer for testing optical surfaces and lenses
3. Digital wave-front measuring interferometry. Some systematic error sources