Formation of metallic surface structures by ion etching using a S-layer template

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 722-724

  Panhorst, M ^a   Bruckl H ^a   Kiefer, B ^a   Reiss, G ^a   Santarius, U ^b   Guckenberger, R ^b  

^a BIELEFELD UNIVERSITY   (Germany)

^b MAX PLANCK INSTITUTE OF BIOCHEMISTRY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ATOMIC FORCE MICROSCOPY; BACTERIA; CRYSTALLINE MATERIALS; FERROMAGNETIC MATERIALS; LATTICE CONSTANTS; NANOTECHNOLOGY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION;

CRYSTALLINE CELL SURFACE LAYERS (S-LAYER);

MAGNETIC THIN FILMS;

EID: 0035326445     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1364699     Document Type: Conference Paper

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