Improved performance of nonevaporable getter activated by a continuous wave infrared laser

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 870-873

  Cha, S N ^a   Choung, J Y ^a   Song, B G ^a   Choi, J M ^a   Han, I T ^a   Park, N S ^a   Jung, J E ^a   Lee, N S ^a   Kim, J M ^a   Chee, J K ^b   Hong, J P ^c  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Hong Ik University   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; COMPUTER SIMULATION; CONTINUOUS WAVE LASERS; ELECTRODES; ELECTRON EMISSION; FIELD EMISSION DISPLAYS; GAS ADSORPTION; HEAT TREATMENT; INFRARED RADIATION; LASER BEAM EFFECTS; SPUTTERING; THERMAL EFFECTS; VACUUM;

NONEVAPORABLE GETTERS (NEG);

GETTERS;

EID: 0035326273     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1371016     Document Type: Conference Paper

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