Technique employing gold nanospheres to study defect evolution in thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 628-633

  Mirkarimi, P B ^a   Baker, S L ^a   Stearns, D G ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GOLD; LITHOGRAPHY; MULTILAYERS; SILICON WAFERS; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

GOLD NANOSPHERES;

NANOSTRUCTURED MATERIALS;

EID: 0035326270     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1364702     Document Type: Conference Paper

References (8)

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4. C. A. J. Putnam et al., Ultramicroscopy 48, 177 (1993).
5. J. Roth, in Techniques in Immunocytochemistry, edited by G. R. Bullock and P. Petrusz (Academic, New York, 1983), pp. 217-284.
6. J. DeMey, in Immunocytochemistry, edited by J. M. Polak and S. Van Noorden (John Wright and Sons, Bristol, 1986), pp. 115-145.
7. R. Giberson (personal communication).
8. P. B. Mirkarimi and D. G. Stearns, Appl. Phys. Lett. 77, 2243 (2000).