Investigation of the diamond tip wear of an atomic force microscope in micromachining

Mocaxue Xuebao/Tribology

Volumn 21, Issue 3, 2001, Pages 176-181

  Zhao, Q L ^a   Liang, Y C ^a   Dong, S ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Chemical wear; Diamond tip; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; FINITE ELEMENT METHOD; SILICON; SINGLE CRYSTALS; WEAR OF MATERIALS;

CHEMICAL WEAR; DIAMOND TIP; SINGLE CRYSTAL SILICON;

MICROMACHINING;

EID: 0035325292     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)