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Volumn 48, Issue 3, 2001, Pages 699-708
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A standing wave-type noncontact linear ultrasonic motor
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Author keywords
[No Author keywords available]
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Indexed keywords
ULTRASONIC MOTORS;
ELECTRIC MOTORS;
ROTORS;
SILICON WAFERS;
STATORS;
SURFACE ROUGHNESS;
VIBRATIONS (MECHANICAL);
ULTRASONIC EQUIPMENT;
ARTICLE;
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EID: 0035324480
PISSN: 08853010
EISSN: None
Source Type: Journal
DOI: 10.1109/58.920696 Document Type: Article |
Times cited : (41)
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References (22)
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