|
Volumn 282, Issue 2-3, 2001, Pages 197-202
|
Drift mobility measurements in a-SiNx:H
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ACTIVATION ENERGY;
ELECTRON MOBILITY;
HYDROGENATION;
NITROGEN;
PHOTOCONDUCTIVITY;
THERMAL EFFECTS;
ELECTRON DRIFT MOBILITY;
SILICON NITRIDE;
|
EID: 0035311173
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00340-4 Document Type: Article |
Times cited : (5)
|
References (12)
|