Electric field in inductively coupled gas discharges

Journal of Applied Physics

Volumn 89, Issue 7, 2001, Pages 3590-3593

  Piejak, R ^a   Godyak, V ^a   Alexandrovich, B ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035309629     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1351871     Document Type: Article

References (9)

1. V. Godyak and J. Schaffer, in Proceedings of the Eighth International Symposium on the Science and Technology of Light Sources, 30 Aug-3 Sept, Greifsald, Germany, 1998, p. 14.
2. R. Piejak, V. Godyak, and B. Alexandrovich, Plasma Sources Sci. Technol. 1, 179 (1992).
3. B. Klarfeld, Techn. Physics USSR 5, 725 (1938).
4. V. L. Granovski, Electric Current in Gas (Steady Current) (Nauka, Moscow, 1971), pp. 248-250, [in Russian].
5. O. Groos, Zs. f. Phys. 88, 741 (1934).
6. B. Klarfeld, Techn. Physics USSR 4, 1,44 (1937).
7. Georges Zissis, Universite Paul Sabatier, Toulouse, France;
8. Graeme Lister, Osram Sylvania Central Research, Beverly, MA (private communications).
9. G. G. Lister, Y. M. Li, and V. A. Godyak, J. Appl. Phys. 79, 8993 (1996).