Density measurements of silicon crystals by hydrostatic weighing

IEEE Transactions on Instrumentation and Measurement

Volumn 50, Issue 2, 2001, Pages 616-621

  Fujii, K ^a   Waseda, A ^a   Tanaka, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Avogadro constant; Density; Hydrostatic weighing; Silicon crystal

Indexed keywords

CALCULATIONS; CHEMICAL POLISHING; ETALONS; SCANNING; SILICON; SINGLE CRYSTALS; SOLIDS; X RAY CRYSTALLOGRAPHY;

AVOGADRO CONSTANT; FLOAT-ZONE METHOD; HYDROSTATIC WEIGHING; SILICON CRYSTAL; X RAY CRYSTAL DENSITY METHOD;

DENSITY MEASUREMENT (SPECIFIC GRAVITY);

EID: 0035308847     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.918205     Document Type: Article

References (13)