Impurity measurement in specialty gases using an atmospheric pressure ionization mass spectrometer with a two-compartment ion source

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 4 B, 2001, Pages 2688-2693

  Kitano, Masafumi ^a   Shirai, Yasuyuki ^a   Ohki, Atsushi ^b   Babasaki, Shinichi ^c   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b Osaka Sanso Kogyo Ltd   (Japan)

^c Nihon Pall Ltd   (Japan)

Author keywords

APIMS; Calibration curve; Impurity; Ion molecule reaction; Specialty gases

Indexed keywords

ATMOSPHERIC PRESSURE; CALIBRATION; IMPURITIES; IONIZATION OF GASES; METHANE; MOISTURE;

ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETERS (APIMS); CALIBRATION CURVES; SPECIALTY GASES;

MASS SPECTROMETERS;

EID: 0035300751     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.2688     Document Type: Article

References (8)