Laser distillation of SiOx, x ≈ 1

Laser Physics

Volumn 11, Issue 3, 2001, Pages 330-335

  Marchenko, V M ^a   Koltashev, V V ^a   Lavrishchev, S V ^a   Murin, D I ^a   Plotnichenko, V G ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

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EID: 0035285630     PISSN: 1054660X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Gel'd, P.V. and Esin, O.A., 1957, High-Temperature Restoration Processes (Sverdlovsk: Gos. Nauch.-Tekh. Izd. Literatury po Chernoi i Tsvetnoi Metallurgii) (in Russian).
2. 1990, Handbook of Semiconductor Silicon Technology, O'Mara, W.C., Herring, R.B., and Hunt, L.P., Eds. (Park Ridge, NJ: Noyes).
3. 1992, Technology of Semiconductor Silicon, Fal'kevich, E.S., Ed. (Moscow: Metallurgiya) (in Russian).
4. Clayes, C. and Vanhellemont, J., 1987, 2nd Int. Autumn Meet, on Gettering and Defect Engineering in the Semiconductor Technology (GADEST), Richter, H., Ed. (Garzau, DDR), p. 5.
5. Setiowati, U. and Kimura, S., 1997, J. Am. Ceram. Soc., 80, 757.
6. Gramon, D. and de Wattvill, 1908, C. R. Acad. Sci., 147, 239.
7. Walkup, R.E. and Raider, S.I., 1988, Appl. Phys. Lett., 53, 888.
8. Nakamura, K.G., Kuroki, H., and Kitajima, M., 1994, Appl. Phys. Lett., 75, 4261.
9. Bashkin, A.S., Kupriyanov, N.L., and Oraevskii, A.N., 1977, Kvantovaya Elektron. (Moscow), 4, 1069.
10. 1990, Chemical Encyclopedia (Moscow: Sov. Entsiklopediya) (in Russian), vol. 2.
11. Marchenko, V.M., Koltashev, V.V., Lavrishchev, S.V., et al., 2000, Laser Phys., 10, 1.