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Volumn 11, Issue 2, 2001, Pages 140-145
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Optically driven angular alignment of microcomponents made of in-plane birefringent polyimide film based on optical angular momentum transfer
a
a
NTT CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALIGNMENT;
BIREFRINGENCE;
LASER BEAMS;
MICROLENSES;
MICROMACHINING;
OPTICAL FILMS;
POLYIMIDES;
PRISMS;
REACTIVE ION ETCHING;
LINEARLY-POLARIZED LASER BEAMS;
MICROMACHINED COMPONENTS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0035280505
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/11/2/309 Document Type: Article |
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Times cited : (20)
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References (19)
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