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Volumn 460, Issue 1, 2001, Pages 165-184
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Processing of silicon UV-photodetectors
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION COATINGS;
ELECTRIC FIELD EFFECTS;
INTERFACES (MATERIALS);
OXIDATION;
PHOTODIODES;
SEMICONDUCTING SILICON;
SILICA;
CARRIER RECOMBINATION;
ULTRAVIOLET DETECTORS;
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EID: 0035277059
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-9002(00)01111-6 Document Type: Article |
Times cited : (8)
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References (16)
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