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Volumn 92, Issue 3, 2001, Pages 207-211
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Development of a new metal casting technique for micromechanical systems;Entwicklung einer neuen metalligießtechnik für die mikromechanik
a a a a |
Author keywords
Capillary action; Micro casting; Micro electromechanical systems (MEMS); Micro mechanical production
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Indexed keywords
CAPILLARY FLOW;
EUTECTICS;
LIQUID METALS;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONIC PROCESSING;
SILVER ALLOYS;
CAPILLARY ACTION;
EUTECTIC SILVER-COPPER ALLOY;
METALLIC MOLTEN MASSES;
MOULD FILLING MECHANISM;
METAL CASTING;
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EID: 0035272564
PISSN: 00443093
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (3)
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References (5)
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