Multivariable feedback relevant system identification of a wafer stepper system

IEEE Transactions on Control Systems Technology

Volumn 9, Issue 2, 2001, Pages 381-390

  De Callafon, Raymond A ^a,b   Van Den Hof, Paul M J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Closed loop identification; Motion control systems; Positioning systems; Robust control; System approximation; System identification

Indexed keywords

FINITE-DIMENSIONAL LINEAR TIME INVARIANT MODELS; WAFER STEPPER SYSTEM;

CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; MOTION CONTROL; MULTIVARIABLE CONTROL SYSTEMS; PERFORMANCE; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SILICON WAFERS;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 0035271910     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/87.911390     Document Type: Article

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