Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

Journal of Chemical and Engineering Data

Volumn 46, Issue 2, 2001, Pages 446-450

  Colominas, Carles ^a,b   Lau, Kai H ^a   Hildenbrand, Donald L ^a   Crouch Baker, Steven ^a   Sanjurjo, Angel ^a  

^a SRI INTERNATIONAL   (United States)

^b INSTITUT QUÍMIC DE SARRIÀ   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EFFUSION; MASS LOSS METHOD; YTTRIUM DIKETONATE;

COPPER; HIGH TEMPERATURE EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR WEIGHT; YTTRIUM COMPOUNDS;

VAPOR PRESSURE;

EID: 0035271487     PISSN: 00219568     EISSN: None     Source Type: Journal    
DOI: 10.1021/je0003445     Document Type: Article

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