A study of the crystalline growth of highly boron-doped CVD diamond: Preparation of graded-morphology diamond thin films

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 306-311

  Einaga, Yasuaki ^a   Kim, Gyu Sik ^b   Park, Soo Gil ^b   Fujishima, Akira ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Chungbuk National University   (South Korea)

Author keywords

Crystalline growth; Graded morphology; Highly boron doped diamond film

Indexed keywords

BORON; CRYSTAL GROWTH; DOPING (ADDITIVES); GRAIN SIZE AND SHAPE; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SUBSTRATES;

MICROWAVE PLASMAS;

DIAMOND FILMS;

DIAMOND;

EID: 0035270375     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00375-2     Document Type: Article

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