Frequency dependent dielectric breakdown of thin polyimide films prepared by vapor deposition polymerization

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 3 A, 2001, Pages 1297-1299

  Miyairi, K ^a  

^a SHINSHU UNIVERSITY   (Japan)

Author keywords

Breakdown; Polyimide; Thin film; Vapor deposition polymerization

Indexed keywords

CATHODE RAY OSCILLOSCOPES; DIELECTRIC PROPERTIES; ELECTRIC BREAKDOWN; POLYIMIDES; POLYMERIZATION; VAPOR DEPOSITION;

THIN POLYIMIDE FILMS;

THIN FILMS;

EID: 0035269784     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1297     Document Type: Article

References (12)