Application of improved phase-measuring profilometry in nonconstant environmental light

Optical Engineering

Volumn 40, Issue 3, 2001, Pages 478-485

  Li, Wan Song ^a   Su, Xian Yu ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

3D sensing; Environmental light; Phase error; Phase measuring profilometry (PMP)

Indexed keywords

ALGORITHMS; CALIBRATION; COMPUTER SIMULATION; IMAGING TECHNIQUES; LEAST SQUARES APPROXIMATIONS; LIGHT MEASUREMENT; PHASE MEASUREMENT;

PHASE-MEASURING PROFILOMETRY (PMP);

PROFILOMETRY;

EID: 0035269623     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1349212     Document Type: Article

References (15)

1. H. Takasaki, "Moiré topography," Appl. Opt. 9(9), 1467-1472 (1970).
2. V. Srinivasan, H. C. Lui, and M. Halioua, "Automatic phase-measuring profilometry of 3-D diffuse object," Appl. Opt. 23(18), 3105-3108 (1984).
3. M. Takeda and K. Mutoh, "Fourier transform profilometry for the automatic measurement 3-D object shapes," Appl. Opt. 22(24), 3977-3982 (1983).
4. J. Li, X.-Y. Su, and L.-R. Quo, "Improved Fourier transform profilometry of the automatic measurement of three-dimensional object shapes," Opt. Eng. 29(12), 1439-1444 (1990).
5. W.-S. Zhou and X.-Y. Su, "A direct mapping algorithm for phase-measuring profilometry," J. Mod Opt. 41, 89-94 (1994).
6. P. Carré, "Installation et utilisation du comparateur photoélectrique et interferentiel du Bureau international des poids et measures," Metrologia 2, 13-23 (1966).
7. J. C. Wyant, "Interferometry optical metrology: basic principles and new systems," Laser Focus, 65-71 (1982).
8. J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and O. E. George, "An optical profilometry for surface characterization of magnetic media," ASLE Trans. 27, 101-113 (1983).
9. C. J. Morgan, "Least-squares estimation in phase-measurement interferometry," Opt. Lett. 7, 368-370 (1982).
10. J. E. Greivenkamp, "Generalized data reduction for the heterodyne interferometry," Opt. Eng. 23, 350-352 (1984).
11. Y. Surrel, "Design of phase-detection algorithms insensitive to bias modulation," Appl. Opt. 36, 805-807 (1997).
12. Y. Ishii, J. Chen, and K. Murata, "Digital phase-measuring interferometry with a tunable laser diode," Opt. Lett. 12, 233-235 (1987).
13. P. Hariharan, "Phase-stepping interferometry with laser diodes: effect of changes in laser power with output wavelength," Appl. Opt. 28, 27-29(1989).
14. R. Onodera and Y. Ishii, "Phase-extraction analysis of laser-diode phase-shifting interferometry that is insensitive to changes in laser power," J. Opt. Soc. Am. A 13(1). 139-146 (1996).
15. X.-Y. Su, G. von Bally, and D. Vukicevic, "Phase-stepping grating profilometry: utilization of intensity modulation analysis in complex object evaluation," Opt. Commun. 98, 141-150 (1993).