Some peculiarities of pulsed laser deposition of large area thin films

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 III, 2001, Pages 3859-3862

  Kuzanyan, A S ^a   Badalyan, G R ^a   Nikoghosyan, V R ^a   Harutyunyan, S R ^a  

^a INSTITUTE FOR PHYSICAL RESEARCH   (Armenia)

Author keywords

Angular distribution of ablated material; Laser parameters; Pulsed laser deposition; Target topography

Indexed keywords

LASER ABLATION; PARTICLES (PARTICULATE MATTER); PULSED LASER DEPOSITION; SPATIAL VARIABLES MEASUREMENT; SURFACE PROPERTIES; THIN FILMS; YTTRIUM BARIUM COPPER OXIDES;

LARGE AREA THIN FILMS; LASER SPOT DIMENSION; PLASMA PLUME ANGULAR DISTRIBUTION; TARGET TOPOGRAPHY;

SUPERCONDUCTING FILMS;

EID: 0035268984     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919907     Document Type: Conference Paper

References (4)

1. 7-δ superconducting thin films
2. Commercial scale-up of pulsed laser deposition
3. Angular distribution of ablated material
4. Three simple methods to obtain large area thin films by pulsed laser deposition