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Volumn 11, Issue 1 I, 2001, Pages 816-819
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Submillimeter superconducting integrated receivers: Fabrication and yield
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Author keywords
Josephson effect; Lift off process; Nb technology; RIE process; SIS junction; SIS mixer; SIS receiver; SNEAP process; Submillimeter receiver; Superconducting tunnel junction
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Indexed keywords
ALUMINA;
ELECTRON DEVICE MANUFACTURE;
MIXER CIRCUITS;
NIOBIUM;
OSCILLATORS (ELECTRONIC);
SIGNAL RECEIVERS;
SILICA;
SUBMILLIMETER WAVES;
TUNNEL JUNCTIONS;
SUPERCONDUCTING INTEGRATED RECEIVERS;
SUPERCONDUCTOR INSULATOR SUPERCONDUCTOR;
SUPERCONDUCTOR TUNNEL JUNCTIONS;
SUPERCONDUCTING DEVICES;
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EID: 0035268844
PISSN: 10518223
EISSN: None
Source Type: Journal
DOI: 10.1109/77.919469 Document Type: Conference Paper |
Times cited : (40)
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References (14)
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