Preparation of Sr2AlTaO6 thin films by metalorganic chemical vapor deposition

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 III, 2001, Pages 3293-3296

  Takahashi, Y ^a   Zama, H ^a   Utagawa, T ^a   Morishita, T ^a   Tanabe, K ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

Author keywords

Dielectric properties; Multilayer; Perovskite compound; Sr Al Ta O

Indexed keywords

CAPACITORS; CRYSTAL STRUCTURE; ELECTRIC CONDUCTANCE; LIQUID PHASE EPITAXY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; STOICHIOMETRY; STRONTIUM COMPOUNDS; SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; YTTRIUM BARIUM COPPER OXIDES;

DOUBLE-METAL ALKOXIDE; PARALLEL CAPACITOR STRUCTURE; STOICHIOMETRIC THIN FILMS;

SUPERCONDUCTING FILMS;

EID: 0035268711     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919766     Document Type: Conference Paper

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