Carbon masks for patterning of YBa2Cu3Ox submicron Josephson junctions

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 I, 2001, Pages 292-295

  Volkov, Ivan A ^a   Kalabukhov, Alexey S ^a   Snigirev, Oleg V ^a   Zherikhin, Alexander N ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b Institute for Laser and Information Technologies   (Russian Federation)

Author keywords

High temperature superconductors; Josephson junctions; SQUIDs; Technology

Indexed keywords

CARBON; DEPOSITION; ELECTRON BEAM LITHOGRAPHY; HIGH TEMPERATURE SUPERCONDUCTORS; LASER ABLATION; MASKS; SINGLE CRYSTALS; SQUIDS; STRONTIUM COMPOUNDS; SUBSTRATES; SUPERCONDUCTING FILMS; YTTRIUM BARIUM COPPER OXIDES;

BICRYSTALS; CARBON MASKS; ION BEAM ETCHING;

JOSEPHSON JUNCTION DEVICES;

EID: 0035268446     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919341     Document Type: Conference Paper

References (13)

1. High-frequency magnetic microscopy using a high-T SQUID
2. c dc superconducting quantum interference device
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4. c SQUID
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6. Superconducting transport properties of grain boundaries in YBCO bicrystals
7. Flux focusing effects in planar thin-film grain-boundary Josephson junctions
8. Bicrystal submicrometer Josephson junctions and dc SQUIDs
9. c submicron structures
10. The velocity destribution of the yttrium particles occuring in the laser plume during the YBCO sputtering
11. 1-xAs thin films
12. Diamondlike carbon films obtained by low cluster beam deposition: Evidence of a memory effect of the properties of free carbon clusters
13. 2 carbon clusters