Measurement of thin film Young's modulus from multilayer membranes

Dianzi Qijian/Journal of Electron Devices

Volumn 24, Issue 1, 2001, Pages 7-

  Zhou, J ^a   Huang, Y P ^a   Mantell Suan, C ^a  

^a NONE

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EID: 0035265306     PISSN: 10059490     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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