Influence of metal thickness on phase velocity and thermal sensitivity of SAW devices

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 2, 2001, Pages 538-546

  Heiiry Briot, Emmanuelle ^a   Ballandras, Sylvain ^a   Marianneau, Gilles ^a   Martin, Gilles ^b  

^a LPMO   (France)

^b Thomson Microsonirs (TMX)   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ACOUSTIC WAVE VELOCITY; PERTURBATION TECHNIQUES; THERMAL EFFECTS;

METAL THICKNESS; PHASE VELOCITY; TEMPERATURE COEFFICIENT OF FREQUENCY; THERMAL SENSITIVITY;

ACOUSTIC SURFACE WAVE DEVICES;

ARTICLE;

EID: 0035263387     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.911737     Document Type: Article

References (19)

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