Surface gettering of background impurities and defects in GaAs Wafers

Semiconductors

Volumn 35, Issue 2, 2001, Pages 177-180

  Vlasenko, L S ^a   Gorelenok, A T ^a   Emtsev, V V ^a   Kamanin, A V ^a   Poloskin, D S ^a   Shmidt, N M ^a  

^a IOFFE INSTITUTE   (Russian Federation)

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[No Author keywords available]

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EID: 0035255495     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1349927     Document Type: Article

References (16)

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