Operational parameter effects on inverter plasma performance

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 69-72

  Takechi, Seiji ^a   Sugimoto, Satoshi ^a   Kiuchi, Masato ^b   Tanaka, Katsutoshi ^a   Goto, Seiichi ^a  

^a OSAKA UNIVERSITY   (Japan)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC INVERTERS; ELECTRIC POTENTIAL; ELECTRODES; GLOW DISCHARGES; PLASMA DENSITY;

INVERTER PLASMAS; PULSE PLASMAS;

PLASMA DEVICES;

EID: 0035254282     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01014-8     Document Type: Article

References (4)

1. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York, 1994.
2. S. Sugimoto, M. Kiuchi, S. Takechi, K. Tanaka, S. Goto, Proceedings PBII99, Surf. Coat. Technol. in press.
3. S. Sugimoto, S. Norikane, A. Takehara, S. Goto, Proceedings of the International Conference on Plasma Physics, Nagoya, 2, (1996) 1826.
4. M. Kiuchi, K. Murai, K. Tanaka, S. Takechi, S. Sugimoto, S. Goto, Proceedings PBII99, Surf. Coat. Technol., in press.