Angular distribution of electrons elastically backscattered from amorphous overlayer systems

Surface Science

Volumn 473, Issue 1-2, 2001, Pages 50-58

  Kwei, C M ^a   Tsai, S S ^a   Tung, C J ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELECTRONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; SEMICONDUCTING SILICON; SEMICONDUCTOR METAL BOUNDARIES; SUBSTRATES;

ANGULAR DISTRIBUTION;

AMORPHOUS FILMS;

EID: 0035250927     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(00)00953-5     Document Type: Article

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