Generalized Petri net modeling approach for the control of re-entrant flow semiconductor wafer fabrication

Robotics and Computer-Integrated Manufacturing

Volumn 17, Issue 1-2, 2001, Pages 5-11

  Odrey, Nicholas G ^a   Green, Jonathan D ^a   Appello, Adrienne ^a  

^a Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER WORKSTATIONS; MATHEMATICAL MODELS; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

RE-ENTRANT FLOW SHOPS;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0035249965     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0736-5845(00)00031-4     Document Type: Article

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