A common path interferometer for testing the optical thickness of possibly birefringent transparent substrates

Measurement Science and Technology

Volumn 12, Issue 2, 2001, Pages 201-212

  Loriette, V ^a   Boccara, A C ^a  

^a Ecl Sup de Phys et Chim Indust   (France)

Author keywords

Interferometry; Metrology; Phase modulation

Indexed keywords

BIREFRINGENCE; INTERFEROMETERS; OPTICAL SYSTEMS; SHEARING; THICKNESS MEASUREMENT;

TRANSPARENT SUBSTRATES;

SUBSTRATES;

INTERFEROMETRY;

EID: 0035248253     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/12/2/311     Document Type: Article

References (7)

1. Applications métrologiques de la strioscopie interférentielle
2. Birefringence imaging with imperfect benches: Application to large-scale birefringence measurements
3. Solution of the shearing problem
4. Wavefront reconstruction for compensated imaging