Zero and direction reference mark based on phase jump

Optical Engineering

Volumn 40, Issue 2, 2001, Pages 289-294

  Zhou, Weidong ^a,b   Cai, Lilong ^b  

^a SICHUAN UNIVERSITY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Interference; Phase jump; Phase modulation; Zero reference mark

Indexed keywords

HETERODYNING; LIGHT INTERFERENCE; OPTICAL PHASE CONJUGATION; OPTICAL VARIABLES MEASUREMENT; PHASE MODULATION;

PHASE JUMP;

OPTICAL SYSTEMS;

EID: 0035247853     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1336525     Document Type: Article

References (12)

1. Design and construction of a large, vertical axis diamond turning machine
2. Development of an interferometer for measurement of linear grating and index scales
3. Stepper overlay performance measurements using the air turbulence compensated interferometer
4. A vertical stepper for synchrotron x-ray lithography
5. Identification and compensation of a noncontact servowriter positioning system
6. Design of zero reference marks for grating measurement systems: A new method
7. The design of zero reference mark for grating measurement systems
8. A phase jump phenomenon in interferometry