Rapid determination of `slow' states and `fast' states densities using thermally stimulated conductance spectroscopy on metal-oxide semiconductor capacitors

Materials Science in Semiconductor Processing

Volumn 4, Issue 1-3, 2001, Pages 141-143

  Duval, E ^a   Soliman, L ^a   Lheurette, E ^a   Ketata, K ^a   Benzohra, M ^a   Duprat, C ^b   Ketata, M ^a  

^a UNIVERSITÉ DE ROUEN   (France)

^b AIME   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRONIC DENSITY OF STATES; INTERFACES (MATERIALS); SEMICONDUCTOR DEVICE STRUCTURES; SPECTROSCOPIC ANALYSIS; THERMOANALYSIS;

THERMALLY STIMULATED CONDUCTANCE SPECTROSCOPY;

MOS CAPACITORS;

EID: 0035247426     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(00)00154-2     Document Type: Article

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