Manufacturing of surface micromachined structures for chemical sensors

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 321-324

  Moldovan, Carmen ^a   Kim, Byong Hak ^b   Raible, Stefan ^b   Moagar, Victor ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT OSCILLATIONS; COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; POLYSILICON;

MICROFABRICATION; POLYSILICON MICROBRIDGES;

CHEMICAL SENSORS;

EID: 0035246766     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01606-0     Document Type: Article

References (3)

1. R.T. Howe, Resonant Microsensors, Transducers'87, 1987, pp. 380-385.
2. R.T. Howe, R.S. Müller, IEEE Trans El. Dev. April (1986) 174.
3. Moldovan C., Moagar V., Craciunoiu F. Vapour concentration or pressure resonant sensor in CMOS technology, MME'98. 1998;268-272 Ulvik, Norway.