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Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2001, Pages 295-300

Spectroscopic ellipsometry in optical coatings manufacturing

(7) Hilfiker, J N a Hale, J S a Johs, B D a Tiwald, T E a Synowicki, R A a Bungay, C L a Woollam, J A a

a J A WOOLLAM CO INC (United States)

Author keywords

Coating thickness; Optical constants; Process control; Spectroscopic ellipsometry

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; DATA ACQUISITION; ELLIPSOMETRY; FEEDBACK; MULTILAYERS; SPECTROSCOPIC ANALYSIS;

SPECTROSCOPIC ELLIPSOMETRY (SE);

OPTICAL COATINGS;

EID: 0035208550 PISSN: 07375921 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.