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Volumn 65, Issue 1, 2001, Pages 453-458
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Relationship between thermal treatment conditions and minority carrier lifetimes in p-type, FZ Si wafers
a a a a
a
Tokyo A&T Univ
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ARGON;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
HIGH TEMPERATURE EFFECTS;
NITROGEN;
OXYGEN;
BULK LIFETIMES;
MICROWAVE DETECTED PHOTOCONDUCTIVE DECAY METHOD;
MINORITY CARRIER LIFETIMES;
NITROGEN VACANCY COMPLEX;
RECOMBINATION CENTERS;
SILICON WAFERS;
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EID: 0035203451
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(00)00126-4 Document Type: Article |
Times cited : (8)
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References (4)
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