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Chemistry of Materials

Volumn 13, Issue 9, 2001, Pages 2801-2806

Soluble polyimides containing benzimidazole rings for interlevel dielectrics

(4) Im Sik Chung, a Chan Eon Park, b Ree, M b Sang Youl Kim, a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b Pohang University of Science and Technology (POSTECH) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

2 PYRROLIDONE DERIVATIVE; BENZIMIDAZOLE DERIVATIVE; COPPER; POLYIMIDE;

ARTICLE; CHEMICAL REACTION; DIELECTRIC CONSTANT; FILM; REACTION ANALYSIS; SOLUBILITY;

EID: 0035199255 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm000838l Document Type: Article

Times cited : (124)

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