Contact holes: Optical area measurement predicts printability and is highly repeatable

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4409, Issue 1, 2001, Pages 592-597

  Scheid, Glen ^a   Taylor, Darren ^b   Fiekowsky, Peter ^c  

^a ALSI Logic   (United States)

^b PHOTRONICS INC   (United States)

^c Automated Visual Inspection   (United States)

Author keywords

Contact holes; Flux area; Photomask metrology; SEM

Indexed keywords

INSPECTION; MASKS; OPTICAL VARIABLES MEASUREMENT; SCANNING ELECTRON MICROSCOPY;

CONTACT HOLES; OPTICAL AREA MEASUREMENT; PRINTABILITY;

LITHOGRAPHY;

EID: 0035191816     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.438330     Document Type: Article

References (0)