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IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 2, 2001, Pages 151-155

  Maynard, D N ^a   Reuter, B B ^a   Rosner, R J ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

Characterization; Checking; Design for Manufacturing (DFM); IBM; Modeling

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER AIDED SOFTWARE ENGINEERING; DATA REDUCTION; FEEDFORWARD NEURAL NETWORKS; PROCESS CONTROL; PRODUCT DESIGN; PRODUCT DEVELOPMENT;

DESIGN FOR MANUFACTURING (DFM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035182939     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Fact and fiction in yield modeling