Statistical bin analysis on wafer probe

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn 2, Issue , 2001, Pages 187-192

  Muriel, Sebastián ^a   García, Paco ^a   Maire Richard, Oscar ^a   Monleón, Marta ^a   Recio, Miguel ^a  

^a Formerly Lucent Technologies ME   (Spain)

Author keywords

Graphical Data Analysis Methodology; Outliers; SPC; Statistical Bin's Limits; Wafer Probe; Yield Analysis

Indexed keywords

ALGORITHMS; DATA REDUCTION; INTRANETS; SEMICONDUCTOR DEVICES; STATISTICAL METHODS; STATISTICAL PROCESS CONTROL;

STATISTICAL BIN ANALYSIS; WAFER PROBES;

WSI CIRCUITS;

EID: 0035182663     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ASMC.2001.925645     Document Type: Article

References (8)