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Chemistry of Materials

Volumn 13, Issue 11, 2001, Pages 4136-4146

Design, synthesis, and characterization of carbon-rich cyclopolymers for 193 nm microlithography

(3) Pasini, D a,b Klopp, J M a,b Frechet J M J a,b

a UNIVERSITY OF CALIFORNIA (United States)

b LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLIC ACID; ALKENE; CARBON; COPOLYMER; MALEIC ANHYDRIDE;

ARTICLE; CHEMICAL BOND; IMAGING; OPTICS; POLYMERIZATION; STRUCTURE ANALYSIS; SYNTHESIS;

EID: 0035179895 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm0104304 Document Type: Article

Times cited : (47)

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