A parallel between silicon splitting kinetics study and IR absorption analysis

IEEE International SOI Conference

Volumn , Issue , 2001, Pages 69-70

  Lagahe, C ^a   Aspar, B ^a   Moriceau, H ^a   Soubie, A ^a   Barge, T ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANNEALING; CHEMICAL BONDS; DIFFUSION IN SOLIDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; ION IMPLANTATION; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

SILICON SPLITTING KINETICS; SMART-CUT PROCESS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0035172593     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)